|
Model |
SEC-4400 |
SEC-4500 |
SEC-4550 |
SEC-4600 |
|
Standard Flow Range(N2 Eq.) |
5 sccm ~ 8 slm |
10 ~ 30 slm |
31 ~ 50 slm |
51 ~ 100 slm |
|
Wetted Materials |
M (bl) -Type: SUS-316L-R (viton) type | |||
|
Valve Piezo Valve |
(Normal Close or Normal Open) | |||
|
Flow Control Range |
2 ~ 100% F.S. | |||
|
Accuracy |
± 1% F.S. | |||
|
Response |
<1.0sec. (500ms typical) | |||
|
Linearity |
± 0.5% F.S. | |||
|
Repeatability |
± 0.2% F.S. | |||
|
Operating Pressure |
14 ~ 42 psi |
21 ~ 42 psi | ||
|
Leak Integrity |
M-Type: 5x10 -10 Pa·m ³/s(He) or less | |||
|
Operating Temperature |
5 ~ 50 °C (Accuracy guaranteed 15 ~ 35 °C) | |||
|
Flow Rate Setting Signal |
0.1 ~ 5VDC | |||
|
Flow Rate Output Signal |
0 ~ 5VDC | |||
|
Power Supply |
± 15VDC ± 5% 60mA | |||
|
Standard Fitting |
1/4” VCR, 1/4” Swagelok |
3/8”VCR,3/8”Swagelok | ||